Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements

dc.contributor.author	Schulz, Christian
dc.contributor.author	Runkel, Jan
dc.contributor.author	Oberberg, Moritz
dc.date.accessioned	2019-01-07T09:09:53Z
dc.date.available	2019-01-07T09:09:53Z
dc.date.issued	2016-02
dc.identifier.issn	00189480
dc.identifier.uri	http://hdl.handle.net/123456789/6805
dc.description	p.616 - 623	en_US
dc.language.iso	en	en_US
dc.relation.ispartofseries	in: IEEE Transactions on Microwave theory and Techniques, Vol.64, n°2 (fév.2016);
dc.subject	Traitement du signal	en_US
dc.subject	Argon	en_US
dc.subject	Câbles coaxiaux	en_US
dc.title	Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements	en_US
dc.type	Article	en_US