Boukezzata, Assia; Keffous, Aissa; Nezzal, Ghania; Gabouze, Noureddine; Kechouane, Mohamed; Zaafane, Kahina; Hammouda, Amirouche; Simon, Patrick; Menari, Hamid
(Elsevier, 2013)
In this letter, we report the study of a humidity sensor based on porous amorphous silicon carbide (PASiC)
as a function of exposure time and relative humidity (RH). Resistive humidity sensors Au–PASiC/Si(p)
were fabricated ...