Dépôt de nitrure de silicium amorphé hydrogène par pulvérisation DC magnetron

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dc.contributor.authorMokeddem, Kamel
dc.date.accessioned2016-02-23T10:08:49Z
dc.date.available2016-02-23T10:08:49Z
dc.date.issued2004
dc.description113 p. : fig. ; 29 cm.(+ microfiche, CD)fr_FR
dc.identifier.urihttp://hdl.handle.net/123456789/4609
dc.language.isofrfr_FR
dc.subjectPhysique des matériauxfr_FR
dc.subjectSilicium amorphé, hydrogènefr_FR
dc.subjectmagnetron (pulvérisation )fr_FR
dc.titleDépôt de nitrure de silicium amorphé hydrogène par pulvérisation DC magnetronfr_FR
dc.typeThesisfr_FR

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