Dépot de nitrure de silicium amorphe hydrogéné par pulvérisation DC magnétron

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dc.contributor.authorMokeddem, Kamel
dc.date.accessioned2017-11-28T09:58:28Z
dc.date.available2017-11-28T09:58:28Z
dc.date.issued2017
dc.description121 p. : ill. ; 30 cm (+ CD-Rom)fr_FR
dc.identifier.urihttp://hdl.handle.net/123456789/5575
dc.language.isofrfr_FR
dc.subjectNitrures de siliciumfr_FR
dc.subjectSiliciumfr_FR
dc.subjectPulvérisationfr_FR
dc.subjectSpectroscopiefr_FR
dc.subjectHydrogènefr_FR
dc.titleDépot de nitrure de silicium amorphe hydrogéné par pulvérisation DC magnétronfr_FR
dc.typeThesisfr_FR

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