Caractérisations électriques d’une décharge plasma RF "applications aux dépôts de couches minces"

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dc.contributor.authorTadjine, Rabah
dc.date.accessioned2018-05-13T12:45:21Z
dc.date.available2018-05-13T12:45:21Z
dc.date.issued2017
dc.description124 p. : ill. ; 30 cm (+ CD-Rom)fr_FR
dc.identifier.urihttp://hdl.handle.net/123456789/6110
dc.language.isofrfr_FR
dc.subjectPulvérisation cathodiquefr_FR
dc.subjectPlasmas (gaz ionisés)fr_FR
dc.subjectDécharges électriquesfr_FR
dc.subjectMagnétronsfr_FR
dc.titleCaractérisations électriques d’une décharge plasma RF "applications aux dépôts de couches minces"fr_FR
dc.typeThesisfr_FR

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