Etude et élaboration de couches minces de carbure de silicium et de membranes
dc.contributor.author | Boukezzata, Assia | |
dc.date.accessioned | 2014-12-04T10:39:33Z | |
dc.date.available | 2014-12-04T10:39:33Z | |
dc.date.issued | 2013 | |
dc.description | 160 p. : ill. ; 30 cm. (+ CD-Rom) | fr_FR |
dc.identifier.uri | http://hdl.handle.net/123456789/889 | |
dc.language.iso | fr | fr_FR |
dc.subject | Carbures de silicium | fr_FR |
dc.subject | Pulvérisation cathodique | fr_FR |
dc.subject | Couche minces | fr_FR |
dc.subject | Capteurs (technologie) | fr_FR |
dc.title | Etude et élaboration de couches minces de carbure de silicium et de membranes | fr_FR |
dc.type | Thesis | fr_FR |
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